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Vapor-assisted hybrid bonding of inorganic/organic substrates for 3D hetero-integration
(有機/無機材料3次元混混載のためのvapor-assisted接合手法)
3rd IEEE International Workshop on LTB-3D. May 22, 2012-May 23, 2012. Invited
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Created at: 2022-09-05 13:41:06 +0900 Updated at: 2024-03-05 11:43:59 +0900