Growth Condition Dependence of Crystallinity and Electric Properties of ScN Films on R-plane Sapphire Substrates
The 11th International Conference on the Science and Technology for Advanced Ceramics. 2019.
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2019-07-13 03:00:21 +0900更新時刻: 2019-07-13 03:00:21 +0900