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Reduction of dislocation density in α-Ga2O3 epilayers by maskless method
Compound Semiconductor Week 2023 (CSW2023). May 29, 2023-June 02, 2023.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2023-06-09 09:58:03 +0900 Updated at: 2023-06-09 09:58:03 +0900