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Vapor-assisted bonding method as a tool for materials hybridization in future 3D integration
(3次元ハイブリッド実装のツールとしての水和物架橋補助低温大気圧接合技術)
IUMRS-ICEM2014. June 11, 2014-June 13, 2014. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 05:24:04 +0900 Updated at: 2024-03-05 11:45:10 +0900