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Role of oxygen transfer for high-k/SiO2/Si stack structure on Vfb shift
(high-k/SiO2/Siスタック構造における酸素移動がVfbシフトへ及ぼす役割)
219th ECS Meeting. May 01, 2011-May 06, 2011. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 12:53:57 +0900 Updated at: 2024-03-05 11:43:15 +0900