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液体原料（Sn(EtCp)2）によるp型SnO薄膜の原子層堆積
(Atomic layer deposition of p-type SnO thin films using a liquid precursor, Sn(EtCp)2)
2026年第87回応用物理学会秋季学術講演会. September 08, 2026-September 11, 2026.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2026-10-08 03:09:45 +0900 Updated at: 2026-10-08 03:09:45 +0900