Characterization of β-Ga2O3 and mosaic Diamond wafers by using EBSD and FIB/STEM technics

Koji TANAKA, Shinya OHMAGARI, Hitoshi UMEZAWA, Hideyuki WATANABE, Minoru TACHIKI, Miwako TAKANO, Hideaki YAMADA, Akiyoshi CHAYAHARA.

12th Asia-Pacific Microscopy Conference (APMC-2020). 2020年02月03日-2020年02月07日.