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diffusion of si in the srti03 thin films from si(100) substrate and its influence to the srti03/si(100）interfacestructures inve
(コンビ手法によるシリコンのsto薄膜中の拡散と拡散の界面構造への影響の解明)
２００１年ＭＲＳ秋季学会. November 26, 2001-November 30, 2001.
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Created at: 2022-09-05 11:09:55 +0900 Updated at: 2022-09-05 11:09:55 +0900