Atomic resolution analyses of Mg distribution and defect formation in Mg+N ion-implanted GaN

Emi Kano, UZUHASHI, Jun, Kosuke Ishikawa, Tetsuo Narita, Kacper Sierakowski, Michal Bockowski, OHKUBO, Tadakatsu, Tetsu Kachi, Nobuyuki Ikarashi.

12th International Workshop on Nitride Semiconductors (IWN2024). 2024年11月03日-2024年11月08日.