HOME > Presentation > DetailHydrogen-boron complexes in heavily boron doped silicon treated with high concentration of hydrogen atoms(高濃度水素原子処理された高濃度ボロンドープシリコン中の水素-ボロン複合体)FUKATA, Naoki. The 23rd International conference on defects in semiconductors. July 24, 2005-July 29, 2005.NIMS author(s)FUKATA, NaokiFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2022-09-05 11:43:08 +0900 Updated at: 2022-09-05 11:43:08 +0900