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AuthorKazuya Arima, Hidetaka Miyatake, TERAJI, Tokuyuki, Toshimichi Ito.
Title高出力MWPCVD法により作製したダイヤモンド薄膜におけるボロン濃度の(100)面に対するオフ角依存性
(Dependence of Off-angle from (100) Surface on Boron-Doping Concentration in High-Quality Diamond Films Grown by High-Power MWPCV)
Event name第53回応用物理学会学術講演会
Year of publication2006
LanguageJapanese

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