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On-chip Diamond MEMS: concept and sensing applications
European Materials Research Society (E-MRS) 2023 Fall meeting. September 18, 2023-September 21, 2023. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2023-10-05 03:22:26 +0900 Updated at: 2024-01-09 03:09:18 +0900