Development of p-type ion implantation technique for realization of GaN vertical MOSFETs

Ryo Tanaka, Shinya Takashima, Katsunori Ueno, Masahiro Horita, Jun Suda, UZUHASHI, Jun, OHKUBO, Tadakatsu, Masaharu Edo.

International Workshop on Junction Technology (IWJT2023). June 08, 2023-June 09, 2023. Invited