Development of p-type ion implantation technique for realization of GaN vertical MOSFETs

Ryo Tanaka, Shinya Takashima, Katsunori Ueno, Masahiro Horita, Jun Suda, UZUHASHI, Jun, OHKUBO, Tadakatsu, Masaharu Edo.

International Workshop on Junction Technology (IWJT2023). 2023年06月08日-2023年06月09日. 招待講演