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Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of outgassing by baking under oxygen

Kazuhiko Mase, Kenichi Ozawa, Tetsuya Miyazawa, Yu Kano, Tetsuya Miyazawa, Takashi Kikuchi, HASHIMOTO, Ayako, Yu Kano, Yasuo Nakayama, Kenichi Ozawa, Toshiharu Iga, 山中 操.
International Vacuum Congress - 2019 (IVC-21). July 01, 2019-July 05, 2019.

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Fulltext and dataset(s) on Materials Data Repository (MDR)

    Created at: 2019-12-02 10:42:29 +0900Updated at: 2019-12-02 10:42:29 +0900

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