Diagnostics of Low Pressure Inductively Coupled VHF Plasma Used for Nanostructued Carbon Deposition
XXXIV International Conference on Phenomena in Ionized Gases(XXXIV ICPIG) & 10th International Conference on Reactive Plasmas(ICRP-10). 2019.
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2020-01-21 03:00:24 +0900更新時刻: 2020-01-21 03:00:24 +0900