Diagnostics of Low Pressure Inductively Coupled VHF Plasma Used for Nanostructued Carbon Deposition
| 著者 | OKADA, Katsuyuki. |
|---|---|
| 会議名 | XXXIV International Conference on Phenomena in Ionized Gases(XXXIV ICPIG) & 10th International Conference on Reactive Plasmas(ICRP-10) |
| 発表年 | 2019 |
| 言語 | English |