Growth Mechanism of the Atomic Layer Deposition of ZnO Thin Films Using Bis(n-propyltetramethylcyclopentadienyl)Zinc

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Growth Mechanism of the Atomic Layer Deposition of ZnO Thin Films Using Bis(n-propyltetramethylcyclopentadienyl)Zinc
(Growth Mechanism of the Atomic Layer Deposition of ZnO Thin Films Using Bis(n-propyltetramethylcyclopentadienyl)zinc)

Fumikazu Mizutani, Makoto Mizui, Nobutaka Takahashi, 井上万里, 生田目俊秀.

21st International Conference on Atomic Layer Deposition (ALD 2021). 2021年06月27日-2021年06月30日.

作成時刻: 2021-07-20 03:00:19 +0900更新時刻: 2021-07-20 03:00:19 +0900