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コンビナトリアルスパッタ法を用いた新規機能性薄膜材料の探索
(Materials screening of novel functional thin films by combinatorial sputter coating technique)
nano tech 2020 (第19回 国際ナノテクノロジー総合展・技術会議). 2020.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2020-12-12 03:00:21 +0900Updated at: 2020-12-12 03:00:21 +0900