Improvement of pumping speeds of oxygen-free palladium/titanium non-evaporable getter (NEG) coating by removing carbon contamination
International Workshop on Trends in Advanced Spectroscopy in Materials Science. 2018.
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作成時刻: 2019-03-04 10:08:50 +0900更新時刻: 2019-03-04 10:08:50 +0900