Improvement of pumping speeds of oxygen-free palladium/titanium non-evaporable getter (NEG) coating by removing carbon contamination
International Workshop on Trends in Advanced Spectroscopy in Materials Science. 2018年10月04日-2018年10月06日.
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Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2019-03-04 10:08:50 +0900 更新時刻: 2019-03-04 10:08:50 +0900