Effective Treatments for Aggregation of Au Thin Films in Selective-Area VLS Growth Process of Ge Nanowires on Si (111)

YUZAWA Shuma, YAMAGUCHI Shuya, OKUDA Shohei, JEVASUWAN, Wipakorn, FUKATA, Naoki, HARA Shinjiro.

2024 International Conference on Solid State Devices and Materials (SSDM 2024). September 01, 2024-September 04, 2024.

Created at: 2024-12-14 03:18:20 +0900 Updated at: 2024-12-14 03:18:20 +0900