酸化膜ストレス緩和方法及びその方法を用いた酸化膜構成体 | SAMURAI, NIMS Researchers Directory Service

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[Published patent application] 酸化膜ストレス緩和方法及びその方法を用いた酸化膜構成体

2003-07-25. 2003209107 (Google Patents) , 3864213

NIMS author(s)

ITAKURA, Akiko

Created at :2023-07-22 21:44:47 +0900 Updated at :2023-07-22 21:44:47 +0900

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