HOME > Published patent applications > Detail[Published patent application] GaInN薄膜の製造方法、及び、GaInN/GaNヘテロ構造の製造方法2026-05-18. 2026080386 (Google Patents) NIMS author(s)SUMIYA, MasatomoCreated at :2026-05-21 03:07:00 +0900 Updated at :2026-05-21 03:07:00 +0900