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[Published patent application] GaInN薄膜の製造方法、及び、GaInN/GaNヘテロ構造の製造方法

2026-05-18. 2026080386 (Google Patents)

NIMS author(s)


Created at :2026-05-21 03:07:00 +0900 Updated at :2026-05-21 03:07:00 +0900

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