HOME > Published patent applications > Detail[Published patent application] 5族元素による酸化物・半導体界面の安定化方法と安定化半導体2002-09-04. US 0137330 A1 (Google Patents) KR20020085891 (Google Patents) USO 0137330 A1 (Google Patents) 20020085891 (Google Patents) 1237183 (Google Patents) NIMS author(s)CHIKYO, ToyohiroCreated at :2023-07-22 21:44:44 +0900 Updated at :2023-07-22 21:44:44 +0900