光の回折方法および回折装置、これらに用いる回折格子、ならびに位置エンコーダ装置 | SAMURAI, NIMS Researchers Directory Service

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[Published patent application] 光の回折方法および回折装置、これらに用いる回折格子、ならびに位置エンコーダ装置

2005-01-13. CN1816759 (Google Patents) EP1640751 (Google Patents) US 2005003823 A1 (Google Patents) WO 2005003823 A1 (Google Patents) USO 2005003823 A1 (Google Patents)

NIMS author(s)

MIYAZAKI, Hideki

Created at :2023-07-22 21:45:03 +0900 Updated at :2023-07-22 21:45:03 +0900

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