HOME > Published patent applications > Detail[Published patent application] 薄膜素子及びその製造方法2004-01-08. 2004006562 (Google Patents) NIMS author(s)CHIKYO, ToyohiroCreated at :2023-07-22 21:44:48 +0900 Updated at :2023-07-22 21:44:48 +0900