HOME > Published patent applications > Detail[Published patent application] 走査型プローブ顕微鏡用のプローブの製造方法2017-01-26. 2017020826 (Google Patents) , 6608634NIMS author(s)SHINGAYA, YoshitakaCreated at :2023-07-22 21:45:50 +0900 Updated at :2023-07-22 21:45:50 +0900