HOME > Published patent applications > Detail[Published patent application] コンビナトリアルスパッタ方法及び装置2018-07-05. 2018104761 (Google Patents) , 6868889NIMS author(s)XU, YibinSASAKI, MichikoGOTO, MasahiroCreated at :2023-07-22 21:45:54 +0900 Updated at :2023-07-22 21:45:54 +0900