HOME > Published patent applications > Detail[Published patent application] 結晶性積層構造体および半導体装置2021-04-08. WO2021066156 (Google Patents) NIMS author(s)OSHIMA, YuichiCreated at :2023-07-22 21:46:10 +0900 Updated at :2023-07-22 21:46:10 +0900