Langmuir Probe Measurements in a Broad-Band Frequency Low Pressure Inductively Coupled Plasma Used for Nanostructured Carbon Dep
(ナノ構造カーボン膜作製用広帯域周波数低圧誘導結合プラズマのラングミュアプローブ計測)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 11:26:48 +0900 Updated at: 2022-09-05 11:26:48 +0900