HOME > その他の文献 > 書誌詳細Cubic boron nitride thin film synthesis on silica substrates by low-pressure inductively-coupled r.f plasma chemical vapor deposKalyanK．Chattopadhyay, 松本精一郎, ZHANG Yafei, SAKAGUCHI, Isao, 蒲生西谷美香, ANDO, Toshihiro. Thin Solid Films 24-28. 1999.NIMS著者坂口 勲Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-09-05 10:56:31 +0900 更新時刻: 2022-09-05 10:56:31 +0900
