Diagnostics of broad-band frequency low pressure inductively coupled plasma with a Langmuir probe
(ラングミュアプローブによる広帯域周波数低圧誘導結合プラズマの診断)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 11:18:58 +0900 Updated at: 2022-09-05 11:18:58 +0900