高電圧パルスによるプラズマを用いたプラズマイオン注入
(Plasma based ion implantation using a plasma ignited by high voltage electric pulses)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2020-11-20 10:40:39 +0900 Updated at: 2020-11-20 10:40:39 +0900