ラジカル酸窒化中の表面応力変動
(Surface stress during radical oxidation and following nitridation)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2020-11-20 10:44:14 +0900 Updated at: 2020-11-20 10:44:14 +0900