Preparation and Crystallization of Tin-doped and Undoped Amorphous Indium Oxide Films Deposited by Sputtering | SAMURAI, NIMS Researchers Directory Service

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Preparation and Crystallization of Tin-doped and Undoped Amorphous Indium Oxide Films Deposited by Sputtering

P. K. Song, H. Akao, KAMEI, Masayuki, Y. Shigesato, I. Yasui.

JAPANESE JOURNAL OF APPLIED PHYSICS 5224-5226. 1999.

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2022-09-05 10:56:51 +0900 Updated at: 2022-09-05 10:56:51 +0900

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