Oxidation Rate and Surface Potential Variations of Silicon During the Plasma Oxidation
(プラズマ酸化によるシリコンの酸化速度と表面電位変動)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2020-11-20 10:36:07 +0900Updated at: 2024-04-02 00:06:09 +0900