HOME > Misc > DetailCombinatorial investigation of ZrO2-based dielectric materials for DRAM capacitorsYuji Kiyota, Yuji Iwashita, Kenji Itaka, Tetsuya Adachi, Toyohiro Chikyow, Atsushi Ogura. ECS TRANSACTIONS 339-346. 2010.https://doi.org/10.1149/1.3481622 NIMS author(s)CHIKYO, ToyohiroFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2022-09-05 12:55:49 +0900 Updated at: 2026-10-03 04:58:03 +0900
