The change of surface stress during radical oxidation and following nitridation | SAMURAI, NIMS Researchers Directory Service

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ラジカル酸窒化中の表面応力変動
(The change of surface stress during radical oxidation and following nitridation)

中村明子, 北島正弘.

薄膜・表面物理分科会シリコンテクノロジー分科会特別研究会報告集 269-273. 2002.

NIMS author(s)

ITAKURA, Akiko

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2022-09-05 11:11:04 +0900 Updated at: 2022-09-05 11:11:04 +0900

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