HOME > その他の文献 > 書誌詳細Diamond MEMS Magnetic Force Sensor Toward Femtonewton at Room TemperatureZilong Zhang, Zhijian Zhao, Meiyong Liao, Takahito Ono, Masaya Toda. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2025 971-974. 2025.https://doi.org/10.1109/mems61431.2025.10917760 Open Access IEEE (Publisher) Materials Data Repository (MDR) NIMS著者廖 梅勇Materials Data Repository (MDR)上の本文・データセットMDRavailable Diamond MEMS Magnetic Force Sensor Toward Femtonewton at Room Temperature 作成時刻: 2025-11-12 03:08:34 +0900 更新時刻: 2026-07-21 04:35:19 +0900
