HOME > その他の文献 > 書誌詳細Formation of β-FeSi2 precipitates at the SiO2/Si interface by Fe+ion implantation and their structural and opticalOYOSHI, Keiji, D.Lenssen, R.Carius, S.Mantl. Thin Solid Films 202-208. 2001.NIMS著者大吉 啓司Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-09-05 10:56:11 +0900更新時刻: 2022-09-05 10:56:11 +0900
