Formation of β-FeSi2 precipitates at the SiO2/Si interface by Fe+ion implantation and their structural and optical | SAMURAI, NIMS Researchers Directory Service

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Formation of β-FeSi2 precipitates at the SiO2/Si interface by Fe+ion implantation and their structural and optical

OYOSHI, Keiji, D.Lenssen, R.Carius, S.Mantl.

Thin Solid Films 202-208. 2001.

NIMS author(s)

OYOSHI, Keiji

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2022-09-05 10:56:11 +0900 Updated at: 2022-09-05 10:56:11 +0900

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