Inelastic Processes in a Low Pressure Inductively Coupled CH4/H2 Plasma
(低圧誘導結合CH4/H2プラズマにおける非弾性過程)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 11:55:35 +0900 Updated at: 2022-09-05 11:55:35 +0900