HOME > その他の文献 > 書誌詳細Numerical Simulation of Low Pressure Inductively Coupled Plasma Sources for Nanostructured Carbon DepositionOKADA, Katsuyuki. Proceedings of ISSP 2015 194-197. 2015.NIMS著者岡田 勝行Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-10-22 02:32:51 +0900更新時刻: 2022-10-22 02:32:51 +0900
