HOME > Misc > DetailNumerical Simulation of Low Pressure Inductively Coupled Plasma Sources for Nanostructured Carbon DepositionOKADA, Katsuyuki. Proceedings of ISSP 2015 194-197. 2015.NIMS author(s)OKADA, KatsuyukiFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2022-10-22 02:32:51 +0900 Updated at: 2022-10-22 02:32:51 +0900