自己組織膜テンプレートを用いた酸化物セラミックスのパターン製膜
(Pattern-Deposition of OxideCeramicFilms using Self-Assembled Monolayer Template)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2020-11-20 10:42:18 +0900Updated at: 2020-11-20 10:42:18 +0900