Study on fluorine-doped indium oxide films deposited by RF magnetron sputtering | SAMURAI, NIMS Researchers Directory Service

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Study on fluorine-doped indium oxide films deposited by RF magnetron sputtering

重里有三, 進奈緒子, KAMEI, Masayuki, 宋豊根, 安井至.

JAPANESE JOURNAL OF APPLIED PHYSICS 6422-6426. 2000.

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2022-09-05 11:01:30 +0900 Updated at: 2022-09-05 11:01:30 +0900

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