STUDY OF CRYSTALLINE DEFECT GENERATION CAUSED BY LIGHT ELEMENT IMPURITIES IN SILICON SUBSTRATE

Tachibana Tomihisa, Sameshima Takashi, Kojima Takuto, Arafune Koji, Kakimoto Koichi, MIYAMURA, Yoshiji, HARADA, Hirofumi, SEKIGUCHI, Takashi, Ohshita Yoshio, Ogura Atshushi.

Technical digest of PVSEC-21 2D-1P-15-2D-1P-15. 2011.

NIMS著者

Materials Data Repository (MDR)上の本文・データセット

作成時刻: 2022-09-05 13:22:24 +0900 更新時刻: 2022-09-05 13:22:24 +0900