Vapor-Assisted Surface Activation Bonding for Low-Temperature Hetero Integration in Ambient Air
(架橋層形成低温大気圧接合法を用いたヘテロインテグレーション)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 13:22:10 +0900 Updated at: 2022-09-05 13:22:10 +0900