Hybrid bonding in ambient air – a feasible tool for mixed integrations
(大気圧ハイブリッド・ボンディングで創る有機・無機材料混載基板)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 13:44:59 +0900 Updated at: 2022-09-05 13:44:59 +0900