HOME > その他の文献 > 書誌詳細Single-Crystal Diamond MEMS for Extreme SensorsMeiyong Liao. 2025 9th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) 2025 1-3. 2025.https://doi.org/10.1109/edtm61175.2025.11041141 Open Access IEEE (Publisher) Materials Data Repository (MDR) NIMS著者廖 梅勇Materials Data Repository (MDR)上の本文・データセットMDRavailable Single-Crystal Diamond MEMS for Extreme Sensors 作成時刻: 2025-07-29 03:08:09 +0900 更新時刻: 2026-08-11 04:42:12 +0900
