HOME > その他の文献 > 書誌詳細Numerical Study on Low Pressure Inductively Coupled Plasma Sources for Nanocrystalline Diamond DepositionOKADA, Katsuyuki, KOMATSU, Shojiro, ISHIGAKI, Takamasa. Proceedings of ISSP2005 137-140. 2005.NIMS著者岡田 勝行Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-09-05 11:47:23 +0900 更新時刻: 2022-09-05 11:47:23 +0900
