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Electron-beam-induced current analysis of dislocations in strained Si/Si0.8Ge0.2

Yuan, Xiaoli, SEKIGUCHI, Takashi, 李成奇, 伊藤俊.

NIMS author(s)


    Fulltext and dataset(s) on Materials Data Repository (MDR)


      Created at: 2022-09-05 11:37:14 +0900 Updated at: 2022-09-05 11:37:14 +0900

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