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Electron Kinetics and Electron Energy Distribution Functions in a Low Pressure Inductively Coupled CH4/H2 Plasma

OKADA, Katsuyuki, KOMATSU, Shojiro, MATSUMOTO, Seiichiro.

Proceedings of ISSP 2007 153-155. 2007.

NIMS author(s)

OKADA, Katsuyuki

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2022-09-05 12:02:12 +0900 Updated at: 2022-09-05 12:02:12 +0900

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